The capability for biosensing, biomedical imaging, and biomolecular manipulation has become essential in current biomedical research and development. Light is very attractive in that it can be utilized for all these functions. Biophotonics is the study of light interaction with biological matter and it is also recently regarded as the key science for the next generation of clinical tools and biomedical research instruments. This research area, however, is still in need for advanced biomedical imaging techniques, highly sensitive biophotonic sensors, and massive/rapid biomolecular manipulation methods. For last decade, a remarkable achievement in nano/microscale manufacturing of engineering materials has been rapidly stimulated by MEMS and NEMS (Micro/Nano Electro-Mechanical systems) technology and moreover high sensitive metrological techniques at micro/nanoscale lead physiologists to deeper understanding on the working mechanism of physiological structures in nature.